• ISSN 0258-2724
  • CN 51-1277/U
  • EI Compendex
  • Scopus 收录
  • 全国中文核心期刊
  • 中国科技论文统计源期刊
  • 中国科学引文数据库来源期刊

基于多物理场的焊球缺陷检测方法

周秀云 薛云 周金龙

周秀云, 薛云, 周金龙. 基于多物理场的焊球缺陷检测方法[J]. 西南交通大学学报, 2017, 30(2): 363-368. doi: 10.3969/j.issn.0258-2724.2017.02.021
引用本文: 周秀云, 薛云, 周金龙. 基于多物理场的焊球缺陷检测方法[J]. 西南交通大学学报, 2017, 30(2): 363-368. doi: 10.3969/j.issn.0258-2724.2017.02.021
ZHOU Xiuyun, XUE Yun, ZHOU Jinlong. Defect Detection of Solder Balls Based on Multi-Physical Field[J]. Journal of Southwest Jiaotong University, 2017, 30(2): 363-368. doi: 10.3969/j.issn.0258-2724.2017.02.021
Citation: ZHOU Xiuyun, XUE Yun, ZHOU Jinlong. Defect Detection of Solder Balls Based on Multi-Physical Field[J]. Journal of Southwest Jiaotong University, 2017, 30(2): 363-368. doi: 10.3969/j.issn.0258-2724.2017.02.021

基于多物理场的焊球缺陷检测方法

doi: 10.3969/j.issn.0258-2724.2017.02.021
基金项目: 

国家自然科学基金资助项目(61271035)

中央高校青年基金资助项目(ZYGX2013J090)

详细信息
    作者简介:

    周秀云(1974-),女,副教授,研究方向为电磁无损检测和光电检测,E-mail:zhouxy@uestc.edu.cn

Defect Detection of Solder Balls Based on Multi-Physical Field

  • 摘要: 为检测倒装焊芯片在生产和服役过程中产生的焊球缺陷,提出了基于电、磁、热多物理场的脉冲涡流热成像检测方法。该方法利用有限元COMSOL软件建立焊球电磁感应热模型,并引入常见的焊球缺陷(空洞和裂纹)进行仿真;提取焊球顶端的温度分布,分析不同缺陷焊球的传热性能并进行缺陷识别;仿真分析裂纹和空洞尺寸变化对温度分布的影响,定量分析焊球缺陷。结果表明:在加热结束时,裂纹(长200 m,高20 m)焊球、空洞(直径150 m)焊球与正常焊球的顶端温度差为一负一正,根据焊球顶端温度的分布特征可以区别不同缺陷焊球,对于裂纹焊球,当裂纹位置越靠近焊球顶端,温度值越高;对于空洞焊球,空洞半径从35 m增大到75 m时,焊球顶端温度呈线性增加。

     

  • 贾松良,胡涛,朱继光. 倒装焊芯片的焊球制作[J]. 半导体技术,2000,25(5): 25-28. JIA Songliang, HU Tao, ZHU Jiguang. Fabrication technology of bumps for flip chip[J]. Semiconductor Technology, 2000, 25(5): 25-28.
    王立成,丁汉,熊有伦. 倒装焊芯片中的非接触检测技术[J]. 机械与电子,2004,4(5): 45-49. WANG Licheng, DING Han, XIONG Youlun. An overview of non destructive inspection in flip chip packaging [J]. Machinery and Electronics, 2004,4(5): 45-49.
    谭琳,汪道辉,张江. 自动光学检测技术在芯片封装中的应用[J]. 微计算机信息,2007,23(2): 66-68. TAN Lin, WANG Daohui, ZHANG Jiang. Automated optical inspection in chip packaging [J]. Microcomputer Information, 2007, 23(2): 66-68.
    SASSOV A, LUYPAERT F. X-ray digital microlaminography for BGA and flip chip inspection[C]//X ray Microscopy: Proceedings of Sixth International Conference. [S.I.]: American Institute of Physics, 2000: 239-244.
    SCHICK A, KEDZIORA M. Inspection and process evaluation for flip chip bumping and CSP by scanning 3D confocal microscopy[C]//2002 8th International Advanced Packaging Materials Symposium. Stone Mountain: IEEE Computer Society, 2002: 116-119.
    WEI Tang, BO Jing, HUANG Yifeng, et al. Defect detection for solder joints with spectrum kurtosis and empirical mode decomposition [C]//Prognostics and System Health Management Conference. Beijing: [s.n.], 2015: 1-5.
    YOON J, LEE J, KIM B, et al. An automated detection method of solder joint defects using 3D computed tomography for ic package inspection [C]//Software and Network Engineering, 2011 First ACIS International Symposium on Software and Network Engineering. Seoul: [s.n.], 2011: 3-6.
    李乐,陈忠,张宪民. 基于微焦点X射线BGA焊点缺陷检测[J]. 电子设计工程,2014(12): 164-166,170. LI Le, CHEN Zhong, ZHANG Xianmin. Defect detection of BGA solder joint based on microfocus X-ray[J]. Electronic Design Engineering, 2014(12): 164-166, 170.
    GAO Bi, BAI Libin, WOO W L. Thermography pattern analysis and separation[J]. Applied Physics Letters, 2014, 104: 251902-5.
    HE Yunze, PAN Mengchun, LUO Feilu. Pulsed eddy current imaging and frequency spectrum analysis for hidden defect nondestructive testing and evaluation[J]. NDT E International, 2011, 44(4): 344-352.
    CHENG Liang, TIAN Guiyun. Surface crack detection for carbon fiber reinforced plastic materials using pulsed eddy current thermography[J]. IEEE Sensor, 2011, 11(12): 3261-3268.
    JOHN W, TIAN Guiyun, ILHAM M, et al. PEC thermography for imaging multiple cracks form rolling contact fatigue[J]. NDT E International, 2011, 44(6): 505-512.
    ZENG Zhi, TAO Ning, Feng Lichun, et al. Specified value based defect depth prediction using pulsed thermography[J]. Applied Physics Letters, 2012, 112(23): 1-6.
    HUTH S, BREITENSTEIN O, HUBER A, et al. Localization of gate oxide integrity defects in silicon metal-oxide-semiconductor structures with lock-in IR thermography[J]. Journal of Applied Physics, 2000, 88(7): 4000-4003.
    JOHN W, TIAN Guiyun, ILHAM Z A, et al. Modeling and evaluation of eddy current stimulated thermography [J]. Non-Destructive Testing and Evaluation, 2010, 25(3): 205-218.
    潘孟春,何赟泽. 涡流热成像检测技术[M]. 北京:国防工业出版社,2013: 60-61.
    LI Mingyu, XU Hongbo, RICKY Shiwei, et al. Eddy current induced heating for the solder reflow of area array packages[J]. IEEE Transactions on Advanced Packaging, 2008, 31(2): 399-403.
    HSIAO H Y, LIANG S W, KU M F, et al. Direct measurement of hotspot temperature in flip-chip solder joints under current stressing using infrared microscopy[J]. Journal of Applied Physics, 2008, 104(3): 1-6.(中文编辑:秦 瑜 英文编辑:兰俊思)
  • 加载中
计量
  • 文章访问数:  531
  • HTML全文浏览量:  59
  • PDF下载量:  200
  • 被引次数: 0
出版历程
  • 收稿日期:  2015-05-05
  • 刊出日期:  2017-04-25

目录

    /

    返回文章
    返回