Tribological Properties of CrN Coatings Prepared by Physical Vapor Deposition
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摘要: 用CETR UMT-2摩擦磨损试验机对比磁过滤阴极真空弧源和多弧离子镀方法制备的CrN涂层在往复滑动条件下的摩擦磨损行为.用X射线衍射、显微硬度计、纳米压痕仪表征涂层的基本特性;用台阶仪、扫描电子显微镜和电子能谱对磨痕进行微观分析,探讨不同结构CrN涂层的磨损失效机理.与多弧离子镀技术制备的CrN涂层相比,磁过滤阴极真空弧源技术制备的CrN涂层更光滑、致密和连续,有较高的硬度和较优越的耐磨性能.涂层微结构的差异是造成摩擦磨损性能差异的主要原因.2种CrN涂层的滑动磨损为磨粒磨损和氧化磨损共同作用的结果.Abstract: Two kinds of CrN coatings were deposited on cemented carbide substrates by filtered cathodic vacuum arc(FCVA) and multi-arc ion plating(MAIP),and their tribological properties were compared on a CETR UMT-2 tribometer under reciprocating sliding.X-ray diffraction(XRD),micro-hardness and nano-indentation were performed to characterize the coatings.The wear scars of the coatings were evaluated by a surface profilometer,scanning electron microscopy(SEM) and energy dispersive X-ray spectrum(EDX).The wear mechanisms of the coatings were discussed.The CrN coatings prepared by FCVA exhibit smoother,denser and continuous coating surface,and possess higher hardness and much better wear resistance.The different microstructures of the coatings are the main cause of the difference in tribological properties for the two coatings.Combination of abrasive wear and oxidative wear is the sliding wear mechanisms for the two coatings.
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Key words:
- CrN coating /
- physical vapor deposition /
- FCVA /
- MAIP /
- friction and wear
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