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脉冲激光沉积ZnO薄膜的微结构及发光性能

李建华 勾治践 范希梅

李建华, 勾治践, 范希梅. 脉冲激光沉积ZnO薄膜的微结构及发光性能[J]. 西南交通大学学报, 2006, 19(6): 709-712.
引用本文: 李建华, 勾治践, 范希梅. 脉冲激光沉积ZnO薄膜的微结构及发光性能[J]. 西南交通大学学报, 2006, 19(6): 709-712.
LI Jianhua, GOU Zhijian, FAN Ximei. Surface Morphology and Photoluminescence Properties of ZnO Films Deposited with PLD[J]. Journal of Southwest Jiaotong University, 2006, 19(6): 709-712.
Citation: LI Jianhua, GOU Zhijian, FAN Ximei. Surface Morphology and Photoluminescence Properties of ZnO Films Deposited with PLD[J]. Journal of Southwest Jiaotong University, 2006, 19(6): 709-712.

脉冲激光沉积ZnO薄膜的微结构及发光性能

基金项目: 

国家重点基础研究司发展规划资助项目(2004CB619301)

详细信息
    作者简介:

    李建华(1970- ),男,讲师,硕士,主要从事机械设计及自动化、计算机应用研究,电话:0431-5955526,E-mail:ljh169@163.com;范希梅(1970- ),女,副教授,博士,电话:028-87600432,E-mail: fanxmiei@ 126.com

    李建华(1970- ),男,讲师,硕士,主要从事机械设计及自动化、计算机应用研究,电话:0431-5955526,E-mail:ljh169@163.com;范希梅(1970- ),女,副教授,博士,电话:028-87600432,E-mail: fanxmiei@ 126.com

Surface Morphology and Photoluminescence Properties of ZnO Films Deposited with PLD

  • 摘要: 用波长为1 064 nm的Nd-YAG激光器,在氧的活性气氛中,通过激光烧蚀Zn靶在Si(111)衬底上获得ZnO薄膜.用电子显微镜(XRD和FESEM)表征ZnO薄膜的结构和表面形貌,用光致发光谱表征光学性质.实验中观察到紫外光发射和深能级的黄绿光发射.紫外光发射是ZnO薄膜的固有性质,深能级光发射是由于存在氧反位缺陷(Ozn).紫外光发射和深能级光发射的强度依赖于薄膜的表面粗糙度.表面粗糙度在nm级范围内的ZnO薄膜可以获得高强度的紫外光.

     

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出版历程
  • 收稿日期:  2005-12-18
  • 刊出日期:  2006-12-25

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