Influences of Planar Pattern on Performances of RFIC Spiral Inductors

ASHBY K B,KOULLIAS I A,FINLEY W C,et al.High-Q inductors for wireless application in a complementary silicon bipolar process[J].IEEE J.Solid-State Circuits,1996,31(1):4-9.[2] CHANG J Y,ABIDI A A,GAITAN M,et al.Large suspended inductors on silicon and their use in a 2μm CMOS RF amplifier[J].IEEE Electron Device Lett.,1993,14(5):246-248.[3] KIM B K,KO B K,LEE K,et al.Monolithic planar RF inductor and waveguide structure on silicon with performance comparable to those in GaAs MMIC[C]//International of Electron Devices Meeting.Washington:IEDM Press,1995:717-720.[4] 刘畅,陈学良,严金龙.新颖的衬底pn结隔离型硅射频集成电路[J].半导体学报,2001,22(12):1 486-1 489.LIU Chang,CHEN Xueliang,YAN Jinlong.Novel substrate pn junction isolation for RF integrated inductors on silicon[J].Chinese Journal of Semiconductors,2001,22(12):1 486-1 489.[5] BURGHARTZ J N,EDELSTEIN D C,JENKINS K A,et al.Monolithic spiral inductors fabricated using a VLSI Cudamascene interconnect technology and low-loss substrates[C]// International of Electron Devices Meeting.San Francisco:IEDM Press,1996:99-102.[6] BURGHARTZ J N,SOYUER M,JENKINS K A,et al.High-Q inductors in standard silicon interconnect technology and its application to an integrated RF power amplifier[C]// International of Electron Devices Meeting.Washington:IEDM Press,1995.1 015-1 018.[7] YUE C P,RYU C,LAUJ,et al.A physical model for planar spiral inductors on silicon[C]//San Francisco:IEDM Press,1996:155-158.[8] YUE C P,WONG S S.On-chip spiral inductor with patterned ground shields for Si-based RFIC's[J].IEEE J.Solid-State Circuits,1998,33(5):743-752.[9] GREENHOUSE H M.Design of planar rectangular microelectronic inductors[J].IEEE Trans.Parts,Hybrids,and Packaging,1974,10(2):101-109.