Short-Period Error Suppression Method of PCB-Based Inductive Linear Displacement Sensor
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摘要:
在直线位移测量中，基于PCB（printed circuit board）工艺的新型电磁感应式位移传感器因具有较大栅距，在制造、装配等工艺环节易导致短周期误差. 在所导致的短周期误差类型中，1次和4次误差是PCB型电磁感应式直线位移传感器中最常见的短周期误差. 因此，为减小测量过程中产生的1次和4次误差，本文从输出信号出发针对此两种误差的产生机理开展研究，并提出一种不依赖外部基准的误差自我修正方法. 首先，从理论层面分析短周期1次和4次误差的来源，以及2种误差与传感器原始SIN（Sine）和COS（Cosine）信号的函数关系；然后，建立基于传感器原始SIN和COS信号特征的短周期误差函数模型，并根据本文传感器样机的实测数据计算出误差函数模型中1次和4次误差的相应参数；最后，将1次和4次误差模型用于传感器样机的误差补偿. 研究结果表明：补偿后的样机实验结果显示误差峰峰值由51.6 μm减小到36.2 μm，其中短周期1次误差减小了约64.5%，短周期4次误差减小了约83%.
Abstract:In the linear displacement measurement, the printed circuit board (PCB)-based new inductive displacement sensors is easy to lead to short-period errors in manufacturing, assembly, and other process links because of its large pitch. Among the types of short-period errors caused, the first-order and fourth-order errors are the most common short-period errors in PCB-based inductive linear displacement sensors. Therefore, in order to reduce the first-order and fourth-order errors, the generation mechanism of these two kinds of errors was first studied from the output signals, and then an error self-correction method that did not depend on external reference was proposed. Firstly, the sources of short-period first-order and fourth-order errors and the functions of the two errors with the original Sine (SIN) and Cosine (COS) signals of the sensor were analyzed theoretically. Then, a short-period error function model based on the characteristics of the original SIN and COS signals of the sensor was established, and the corresponding parameters of the first-order and fourth-order errors in the error function model were calculated based on the measured data of the sensor prototype. Finally, the first-order and fourth-order error models were used for the error compensation of the sensor prototype. The results of prototype experiments show that the peak-to-peak value of the error after compensation is reduced from 51.6 μm to 36.2 μm. The short-period first-order error is reduced by about 64.5%, and the short-period fourth-order error is reduced by about 83%.
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Key words:
- sensor /
- linear displacement /
- induction /
- error suppression /
- self-correction
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图 7 一个栅距的SIN\COS感应线圈感应电动势
Figure 7. Induced electromotive force of SIN\COS induction coil in single-pitch movement
图 8 感应电动势的幅频、相频图
Figure 8. Amplitude and phase-frequencies of induced electromotive force
图 10 补偿1次和4次误差后的短周期误差和误差频次对比
Figure 10. Comparison of short-period errors and error frequencies after compensating for first-order and fourth-order errors
表 1 误差函数
Table 1. Error functions
误差频次/次 误差函数/mm 1 $0.008\;3\sin \left( { - \dfrac{ { { {2\text{π} } }x} }{L} - 0.665} \right)$ 4 $0.006\;7\sin \left( {4 {\text{•}} \dfrac{ { { {2\text{π} } }x} }{L} + 5.568} \right)$ 
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